Application background
The customer, a top-tier foundry operating a 12-inch advanced-node line, required a bulk N₂ purifier upstream of its point-of-use distribution network. Existing purification equipment could not consistently guarantee sub-ppb impurity levels required for critical epi and CVD process tools.
Feed gas & process conditions
| Gas | Bulk N₂ from cryogenic ASU |
|---|---|
| Flow | 5 000 Nm³/h |
| Pressure | 0.9 MPa (g) |
| Temperature | Ambient |
| Inlet impurities | O₂ 100 ppb, H₂O 500 ppb, CO/CO₂ 50 ppb, THC 100 ppb |
| Outlet requirement | O₂ / H₂O / CO / CO₂ / THC < 1 ppb (9N) |
Main impurity challenge
Consistent sub-ppb removal of five impurity classes under continuous 24/7 duty, with automated regeneration and full particle control (>0.003 μm at 10 CFM).
Recommended product
Ultra-High-Purity Gas Purifiers
Kaiteli UHP-N9 Nitrogen Purifier Skid
Duplex vessel design with automated PSA/TSA regeneration and 316L VIM-VAR electropolished internals.
Technical result
- Continuous outlet O₂, H₂O, CO, CO₂ and THC verified < 1 ppb by APIMS.
- Fully automated regeneration with < 0.05% purge loss.
- Commissioned on schedule; particle count below detection at 0.003 μm.
Customer value
Enabled qualification of advanced-node process tools, eliminated recurring quality excursions and reduced total cost of ownership vs. imported purifier competitors by ~22%.